On chip capacitor

ABSTRACT

A high capacity silicon capacitor formed on an integrated circuit substrate includes a metal portion on the substrate; a silicon nitride (SiN) portion sputtered on the metal; a silicon (Si) portion sputtered on the silicon nitride portion, another SiN layer and finally a metal layer. The SiN layers are for increased isolation and are optional.

[0001] This application is a division of U.S. application Ser. No.09/836,110 filed Apr. 16, 2001, the content of which is incorporated byreference.

BACKGROUND

[0002] This invention relates to systems and methods for forming acapacitor in an integrated circuit.

[0003] The integration of high value capacitors in integrated circuitsis limited by the fact that conventional high value capacitors take up alarge areas of on integrated circuit chip, and restrict interconnectrouting in the region of the capacitor, thus reducing the device packingdensity and layout efficiency. Many applications, includingtelecommunications equipment, require a large number of capacitors, e.g.as coupling/decoupling capacitors and for filters. Often, these must beincorporated as discrete off-chip components, substantially increasingcost, weight, and volume of the peripheral circuitry.

[0004] The minimum dimensions of integrated circuit capacitors aredetermined primarily by the relatively low dielectric constant (e<10),of conventional capacitor dielectrics, e.g. silicon dioxide and siliconnitride. Thus as device dimensions decrease, there is increasinginterest in other dielectrics with higher dielectric constants. Asdiscussed in U.S. Pat. No. 5,789,303, ferroelectric materials have largedielectric constants (.about.500), and thus they are also ideally suitedas dielectrics for fabrication of integrated circuit capacitors withsmall dimensions and large capacitance values, e.g. for use ascoupling/de-coupling capacitors and as filter elements. However, becauseferroelectric materials contain chemical elements not typically found inconventional integrated circuit materials, interdiffusion of elements ofthe ferroelectric material, heavy metals from the electrode materials,and surrounding materials may occur, causing contamination anddegradation of electrical characteristics. This is of particular concernwhere ferroelectric materials are in close proximity to active devices.

[0005] U.S. Pat. No. 6,287,910 to Lee, et al. on Sep. 11, 2001 shows amethod for fabricating a capacitor for a semiconductor device by forminga lower electrode on an understructure of a semiconductor substrate;depositing an amorphous TaON thin film over the lower electrode;subjecting the amorphous TaON thin film to a thermal process in an NH₃atmosphere to form a Ta₃N₅ dielectric film; and forming an upperelectrode on the Ta₃N₅ dielectric film. In another embodiment, Lee showsa method for fabricating a capacitor for a semiconductor device,comprising the steps of: forming a lower electrode on an understructureof a semiconductor substrate; forming an amorphous TaON thin film overthe lower electrode; subjecting the amorphous TaON thin film to athermal process in an NH₃ atmosphere at a temperature of 600 to950.degree. C. to form a Ta₃N₅ dielectric film; annealing the Ta₃N₅dielectric film; and forming an upper electrode on the Ta₃N₅ dielectricfilm. In another embodiment, Lee provides a method for fabricating acapacitor for a semiconductor device, comprising the steps of: forming alower electrode on an understructure of a semiconductor substrate;nitriding the lower electrode in an NH₃ atmosphere; forming an amorphousTaON thin film over the lower electrode; subjecting the amorphous TaONthin film to a thermal process in an NH₃ atmosphere at a temperature of600 to 950 degree C. to form a Ta₃N₅ dielectric film; annealing theTa₃N₅ dielectric film; and forming an upper electrode on the Ta₃N₅dielectric film.

SUMMARY

[0006] In one aspect, a silicon capacitor formed on an integratedcircuit substrate includes a metal portion on the substrate; a siliconnitride (SiN) portion sputtered on the substrate; and a silicon (Si)portion sputtered on the silicon nitride portion. Another SiN portioncan be sputtered on the Si portion; and a metal layer can be depositedon top of the SiN layer.

[0007] Advantages of the invention may include one or more of thefollowing. The invention can form high value capacitors on chip. Thecapacitors are formed using a process that is CMOS compatible, easy todeposit, and inexpensive. Furthermore, the improved dielectric constantprovided by the amorphous silicon dielectric film makes it possible toeliminate any additional process steps that had been used to increasethe surface area, and thus increase the capacitance, of the lowerelectrodes. Eliminating these steps reduces the overall process time andcost. Further, the simplified structures, and the resultingsimplification of the overall device topography, may result inimprovements in subsequent photolithographic and etch processes. Thecapacitor can be used in a wide variety of applications, including anintegrated charge pump, a bypass capacitor, a precision conversioncapacitor, and a LC tank frequency generator circuit (wireless) amongothers.

BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The following detailed description of the embodiments can best beunderstood when read in conjunction with the following drawings, inwhich:

[0009]FIG. 1 shows a cross-sectional view of an integrated circuitsilicon capacitor.

[0010]FIG. 2 illustrates an exemplary process for making the siliconcapacitor of FIG. 1.

[0011]FIG. 3 shows a second embodiment of a silicon capacitor.

[0012]FIG. 4 is a block diagram of a portable appliance using thecapacitor of FIG. 1.

DESCRIPTION

[0013] A method for fabricating capacitors for semiconductor devices inaccordance with the present invention is described in detail below. Inthe following description, reference is made to the accompanyingdrawings which form a part hereof, and in which are shown by way ofillustration specific embodiments in which the invention may bepracticed. It is to be understood that other embodiments may be utilizedand structural changes may be made without departing from the scope ofthe present invention.

[0014] In fabricating capacitors in accordance with the method of thepresent invention, a semiconductor substrate 10, which may be a siliconsubstrate, is first prepared, as shown FIG. 1. Although such structuresare not illustrated in the Figures, it will be appreciated that thesemiconductor substrate 10 will typically have already undergoneextensive processing to create various features and elements that arerequired to produce a fully functional semiconductor device. Thesestructures will typically include active and isolation regions, dopedregions including wells, channel-stops, sources and drains, insulatinglayers, such as oxides, nitrides, or oxynitrides, and conductive layerssuch as polysilicon or silicide.

[0015] Utilizing photolithography and dry etch processes, a series ofcontact openings are then formed at predetermined locations to form abottom metal electrode 20. These contact openings will provide a contactpath between predetermined areas of the semiconductor substrate 10 andthe lower electrode of the capacitor. Next, a metal portion 30 isdeposited on the substrate 10, and a silicon nitride (SiN) portion 22 issputtered on the metal portion 30 to decrease leakage. Alternatively,other insulating film, such as undoped silicate glass (USG),borophosphosilicate glass (BPSG), or SiON, can be formed or deposited,including those described in U.S. Pat. No. 6,287,910 to Lee, et al. onSep. 11, 2001. This insulating layer then planarized, typically using achemical mechanical polishing (CMP) process, to form an interlayerinsulating film.

[0016] A silicon (Si) portion 24 is sputtered on the SiN portion 22. Inone embodiment, the silicon portion 24 is an amorphous silicon (aSi)layer with a dielectric constant of about 11.7, which is three times thedielectric constant of glass. Since capacitance is a function of area,epsilon, resistance, and dielectric thickness, the amorphous siliconlayer allows capacitors to be highly compact. In the amorphous siliconform, silicon is resistive and does not conduct with a resistance inexcess of mega-ohms. Thus, for low volt apps, silicon is good materialto use in designing capacitors. To illustrate, in certain siliconembodiments where the resistance is on giga-ohm per square micron, acapacitor with a million square microns will have leakage of only one(1) microampere which is acceptable for most applications.

[0017] Multiple sandwiched layers with alternating layer(s) of SiN 22and Si 24 portions can be formed on the substrate 10. The conductivelayer 30 such as a metal layer is formed on top of the capacitor to forma lower electrode. Using photolithography and etch processes, the layerof conductive material is selectively patterned and etched to form metalelectrodes 32. Each of the metal electrodes 32 incorporates at least onecontact opening for providing electrical contact between the electrodeand the semiconductor substrate 10.

[0018] It is expected that the electrode 30 having a simple planar stackstructure will be sufficient to provide sufficient capacitance. Ofcourse, the present invention is equally suitable for use with morecomplex lower electrode 30 structures such as stepped, cylinder, fin orother three-dimensional configuration.

[0019] In this manner, a metal insulator metal (MIM) capacitor can beformed by depositing metal, sputtering silicon nitride (decreaseleakage), sputtering Si. Further, a sandwich with a thin layer of SiNand Si, and then a metal layer on top can be added to increase energystorage capacity of the capacitor. Moreover, these layers can be stackedto increase capacity.

[0020]FIG. 2 shows an exemplary process for forming the capacitor ofFIG. 1. First, the substrate 10 is prepared (step 52). Next, a bottomlayer electrode is deposited (step 54). The silicon nitride 22 is thendeposited (step 56), and followed by the deposition of the amorphoussilicon 24 (step 58). Multiple sandwiched layers with alternatinglayer(s) of SiN 22 and Si 24 portions can be formed on the substrate 10.Finally, the metal 30 is deposited.

[0021] Thus the invention provides a method and structure for acost-effective high capacity on-chip capacitor. Advantageously, thecapacitor is well-suited for use in a device such as a mixed signalintegrated circuit chip, as well as an electronic system including aprocessor/memory and analog components such as A/D and D/A converters,imagers and RF circuits.

[0022]FIG. 3 shows a second embodiment of a silicon capacitor on anintegrated circuit substrate. This embodiment includes a metal portion200 on the substrate; a silicon nitride (SiN) portion 202 sputtered onthe metal; a silicon (Si) portion 204 sputtered on the silicon nitrideportion, another SiN layer 206 and finally a metal layer 208. The SiNlayers 202 and 206 provide increased isolation and are optional. Theprocess for forming the capacitor is as follows:

[0023] 1. Deposit metal

[0024] 2. Start sputtering Silicon with nitrogen gas to form a lowleakage layer of SiN (4A)

[0025] 3. Remove nitrogen gas flow to deposit pure silicon (40A)

[0026] 4. Add nitrogen gas again to cap the layer off with SiN (which isinsulating 40 A)

[0027] 5. Deposit Metal

[0028] This type of capacitor is estimated to have approximately 2.5times the capacitance of an identical thickness of silicon dioxide (thematerial currently in use).

[0029] The capacitors of FIGS. 1-3 can be used in a mixed mode integratecircuit. FIG. 4 shows a block diagram of a multi-mode wirelesscommunicator device 300 fabricated on a single silicon integrated chip.In one implementation, the device 300 is an integrated CMOS device withan A/D converter, radio frequency (RF) circuits, including a cellularradio core 310, a short-range wireless transceiver core 330, and an RFsniffer 311, along side digital circuits, including a reconfigurableprocessor core 350, a high-density memory array core 370, and a router390. The high-density memory array core 370 can include various memorytechnologies such as flash memory and static random access memory(SRAM), among others, on different portions of the memory array core.Through the router 390, the multi-mode wireless communicator device 300can detect and communicate with any wireless system it encounters at agiven frequency. The router 390 performs the switch in real time throughan engine that keeps track of the addresses of where the packets aregoing. The router 390 can send packets in parallel through two or moreseparate pathways.

[0030] The reconfigurable processor core 350 controls the cellular radiocore 310 and the short-range wireless transceiver core 330 to provide aseamless dual-mode network integrated circuit that operates with aplurality of distinct and unrelated communications standards andprotocols such as Global System for Mobile Communications (GSM), GeneralPacket Radio Service (GPRS), Enhance Data Rates for GSM Evolution (Edge)and Bluetooth™. The cell phone core 310 provides wide area network (WAN)access, while the short-range wireless transceiver core 330 supportslocal area network (LAN) access. The reconfigurable processor core 350has embedded read-only-memory (ROM) containing software such asIEEE802.11, GSM, GPRS, Edge, and/or Bluetooth™ protocol software, amongothers.

[0031] In one embodiment, the cellular radio core 310 includes atransmitter/receiver section that is connected to an off-chip antenna(not shown). The transmitter/receiver section is a direct conversionradio that includes an I/Q demodulator, transmit/receiveoscillator/clock generator, multi-band power amplifier (PA) and PAcontrol circuit, and voltage-controlled oscillators and synthesizers. Inanother embodiment of transmitter/receiver section 312, intermediatefrequency (IF) stages are used. In this embodiment, during cellularreception, the transmitter/receiver section converts received signalsinto a first intermediate frequency (IF) by mixing the received signalswith a synthesized local oscillator frequency and then translates thefirst IF signal to a second IF signal. The second IF signal ishard-limited and processed to extract an RSSI signal proportional to thelogarithm of the amplitude of the second IF signal. The hard-limited IFsignal is processed to extract numerical values related to theinstantaneous signal phase, which are then combined with the RSSIsignal.

[0032] For voice reception, the combined signals are processed by theprocessor core 350 to form PCM voice samples that are subsequentlyconverted into an analog signal and provided to an external speaker orearphone. For data reception, the processor simply transfers the dataover an input/output (I/O) port. During voice transmission, an off-chipmicrophone captures analog voice signals, digitizes the signal, andprovides the digitized signal to the processor core 350. The processorcore 350 codes the signal and reduces the bit-rate for transmission. Theprocessor core 350 converts the reduced bit-rate signals to modulatedsignals, for example. During data transmission, the data is modulatedand the modulated signals are then fed to the cellular telephonetransmitter of the transmitter/receiver section.

[0033] Turning now to the short-range wireless transceiver core 330, theshort-range wireless transceiver core 330 contains a radio frequency(RF) modem core 332 that communicates with a link controller core 334.The processor core 350 controls the link controller core 334. In oneembodiment, the RF modem core 332 has a direct-conversion radioarchitecture with integrated VCO and frequency synthesizer. The RF-unit332 includes an RF receiver connected to an analog-digital converter(ADC), which in turn is connected to a modem 316 performing digitalmodulation, channel filtering, AFC, symbol timing recovery, and bitslicing operations. For transmission, the modem is connected to adigital to analog converter (DAC) that in turn drives an RF transmitter.

[0034] According to one implementation, when the short-range wirelesscore 330 in the idle mode detects that the short-range network usingBluetooth™ signals, for example, have dropped in strength, the device300 activates the cellular radio core 310 to establish a cellular link,using information from the latest periodic ping. If a cellularconnection is established and Bluetooth™ signals are weak, the device300 sends a deregistration message to the Bluetooth™ system and/or aregistration message to the cellular system. Upon registration from thecellular system, the short-range transceiver core 330 is turned off orput into a deep sleep mode and the cellular radio core 3 1 0 andrelevant parts of the synthesizer are powered up to listen to thecellular channel.

[0035] The router 390 can send packets in parallel through the separatepathways of cellular or Bluetooth™. For example, if a Bluetooth™connection is established, the router 390 knows which address it islooking at and will be able to immediately route packets using anotherconnection standard. In doing this operation, the router 390 pings itsenvironment to decide on optimal transmission medium. If the signalreception is poor for both pathways, the router 390 can send somepackets in parallel through both the primary and secondary communicationchannel (cellular and/or Bluetooth™) to make sure some of the packetsarrive at their destinations. However, if the signal strength isadequate, the router 390 prefers the Bluetooth™ mode to minimize thenumber of subscribers using the capacity-limited and more expensivecellular system at any give time. Only a small percentage of the device300, those that are temporarily outside the Bluetooth coverage,represents a potential load on the capacity of the cellular system, sothat the number of mobile users can be many times greater than thecapacity of the cellular system alone could support. All the aboveimplementations have circuits combining low noise devices withhigh-speed, high-noise digital transistors on the same siliconsubstrate. By using the present invention on the digital transistorsclosest to the low-noise sections, the impact of the generated noise canbe greatly reduced.

[0036] Although specific embodiments have been illustrated and describedherein, it is appreciated by those of ordinary skill in the art that anyarrangement which is calculated to achieve the same purpose may besubstituted for the specific embodiments shown. This application isintended to cover any adaptations or variations of the presentinvention. Therefore, it is manifestly intended that this invention belimited only by the claims and the equivalents thereof.

What is claimed is:
 1. A method for forming a silicon capacitor,comprising: depositing a metal portion on a substrate; sputtering asilicon nitride (SiN) portion on the metal portion and the substrate;and sputtering a silicon (Si) portion.
 2. The method of claim 1, furthercomprising forming a sandwich with layers of SiN and Si.
 3. The methodof claim 2, further comprising developing a metal layer adjacent to thesandwich.
 4. The method of claim 1, wherein the silicon nitridedecreases leakage.
 5. The method of claim 1, further comprisingdepositing a second silicon nitride portion.
 6. The method of claim 1,further comprising depositing a second metal portion.
 7. The method ofclaim 1, further comprising: depositing metal on the substrate;sputtering silicon with nitrogen gas to form SiN; removing nitrogen gasflow to deposit pure silicon; adding nitrogen gas again to cap the layerwith SiN; and depositing metal.
 8. The method of claim 1, wherein eachlayer deposited is approximately forty angstroms thick.